Figure 8

XRC-FWHM of AlN (0002) and AlN (10–12) after heat treatment of Al/GaN samples with various holding times of 0–3 h at temperatures of 1473–1673 K.

XRC-FWHM of AlN (0002) and AlN (10–12) after heat treatment of Al/GaN samples with various holding times of 0–3 h at temperatures of 1473–1673 K.