Figure 2
(a) Graphene Raman spectra comparing before and after PE-ALD of Al2O3 with Al seed and with no seed. (b) Map of maximum Ids from graphene FET wafer comparing effect of Al seed layer prior to Al2O3 deposition.
Figure 2 | Scientific Reports
(a) Graphene Raman spectra comparing before and after PE-ALD of Al2O3 with Al seed and with no seed. (b) Map of maximum Ids from graphene FET wafer comparing effect of Al seed layer prior to Al2O3 deposition.
