Figure 3
From: Unravelling oxygen driven α to β phase transformation in tungsten
High-resolution W 4f XPS spectra for films A (a) and B (b), fitted (black line) by using a non-linear least square error minimization procedure. The fitting components are shown. Depth dependent elemental profiles of Si-K, W-L, O-K and Pt-K edges along the EDX traces across the W films of A (c) and B (d) are shown. The inset of (c) depicts a typical EDX map of sample A, where the scale bar is 30 nm. The upward arrow from the Si substrate to the film surface represents the direction along which EDX trace was recorded.
