Figure 8
From: Characterization of semi-polar (20\(\overline{2}\)1) InGaN microLEDs

Process flowchart of μ-LEDs and OM image of blue LEDs after the whole process.
From: Characterization of semi-polar (20\(\overline{2}\)1) InGaN microLEDs

Process flowchart of μ-LEDs and OM image of blue LEDs after the whole process.