Table 2 The structural parameters of the micro-gyroscope.
Parameters | Value | Parameters | Value |
|---|---|---|---|
Density | 2.33 × 103 kg/m3 | Young’s modulus | 130 GPa |
Poisson’s ratio | 0.3 | Structural thickness | 100 µm |
Drive beam length | 700.5 µm | Sense beam length | 842 µm |
Drive beam width | 30 µm | Sense beam width | 30 µm |
Drive beam stiffness | 7978.6 N/m | Sense beam stiffness | 4600.8 N/m |
Drive mass | 2.8308 × 10–6 kg | Sense mass | 1.7597 × 10–6 kg |
