Figure 12

Ellipsometry spectra of the non-hydrogenated a-\(\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}\) sample (‘A’) at the Si-rich and Ge-rich sides for different angles of incidence measured (symbols) and fitted (solid lines) by the CL dispersion. The difference between the measured (\(\Psi _m, \Delta _m \)) and calculated (\(\Psi _c, \Delta _c\)) ellipsometric angles is also included (a). The optical model and the schematic measurement configuration are shown on the right-hand side (b).