Figure 13 | Scientific Reports

Figure 13

From: Micro-combinatorial sampling of the optical properties of hydrogenated amorphous \(\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}\) for the entire range of compositions towards a database for optoelectronics

Figure 13

1.6 MeV \(\hbox {He}^+\) (a) RBS and (b) ERDA spectra as a function of the lateral position along the sample, for an a-\(\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}\):H layer with nominally 20% H content and with deposition rate of 0.4 nm/s. In (a), for comparison, a reference spectrum for a bare Si sample is also shown. Surface edges for Si, Ge, and H are represented by arrows.

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