Table 6 ANOVA results for multiple regression models.
Process parameters | Y1 | Y2 | Y3 | Y4 | Y5 | Y6 | ||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
Coefficient | P value | Coefficient | P value | Coefficient | P value | Coefficient | P value | Coefficient | P value | Coefficient | P value | |
Constant | − 346.607 | 325,052.805 | 21,493.781 | − 15,523.097 | 5054.318 | − 0.7618 | ||||||
X1 | − 54.739 | 0.6925 | 683.552 | 0.6011 | − 80.341 | 0.3744 | − 0.0014 | 0.0170 | ||||
X2 | − 9928.885 | 0.0200 | − 9026.701 | 0.0203 | 1888.456 | 0.7591 | − 2716.876 | 0.7914 | 0.1024 | 0.0017 | ||
X3 | − 7009.760 | 0.0804 | − 221.201 | 0.6957 | 0.0131 | 0.0062 | ||||||
X4 | − 181.541 | 0.0020 | − 10.598 | 0.0174 | − 0.0449 | 0.3841 | ||||||
Z3 | − 0.614 | 0.0108 | ||||||||||
Z7 | − 2.816 | 0.0324 | − 1.946 | 0.0147 | − 3.419 | 0.0037 | ||||||
Z8 | 1.846 | 0.0006 | 2.889 | < 0.0001 | 0.691 | 0.0053 | 0.810 | 0.0025 | ||||
X1X2 | 60.954 | 0.0350 | ||||||||||
X1X4 | 3.365 | 0.0834 | 0.0005 | 0.0532 | ||||||||
X2X3 | 110.205 | 0.0045 | 152.158 | 0.0213 | ||||||||
X12 | − 7.643 | 0.0386 | ||||||||||
X22 | 1543.544 | 0.0278 | − 622.660 | 0.0826 | ||||||||
X32 | 37.338 | 0.0102 | ||||||||||
X42 | 0.0007 | 0.0128 | ||||||||||
R2 | 0.8703 | 0.9872 | 0.9431 | 0.9844 | 0.9449 | 0.9262 | ||||||
\({\text{R}}_{{{\text{adj}}}}^{2}\) | 0.8443 | 0.9744 | 0.8633 | 0.9625 | 0.9005 | 0.8524 | ||||||
P value | < 0.0001 | < 0.0001 | 0.0076 | 0.0003 | 0.0003 | 0.0036 | ||||||