Figure 7

Experimental verification of the DGSPR metasurface for 16-element supercells. (a) Ideal and real scanning electron microscopy images of designed and fabricated supercells. (b) Optical images of diffraction orders for a wavelength of \({900}\,\hbox {nm}\) and for TM and TE polarization as well as a reference sample (Ref.) consisting of \({70}\,\hbox {nm}\) of SiO2 atop a \({70}\,\hbox {nm}\) gold substrate. (c) Calculated (lines) and measured (markers) diffraction efficiencies for orders \(|m|\le 1\) as a function of wavelength for TM and TE polarization.