Table 5 Summary of height, width and the corresponding resonance frequency and walls displacement used for fixed acoustic energy density and cross-sectional area.
H [µm] | W [µm] | fres [MHz] | AR | l0 [m] |
|---|---|---|---|---|
247 | 247 | 3.028 | 1 | 3.460e−11 |
270 | 225 | 3.324 | 1.2 | 2.780e−11 |
302 | 201 | 3.721 | 1.5 | 2.170e−11 |
349 | 174 | 4.299 | 2 | 1.514e−11 |