Table 1 Summary of the benefits brought by the use of patterned growth (SAVWE) for the transfer process of devices on host substrates.

From: Effectiveness of selective area growth using van der Waals h-BN layer for crack-free transfer of large-size III-N devices onto arbitrary substrates

 

Crystalline quality of epilayers

Crack free devices after release

Transfer yield of fully functional devices

Device performance (I–V and EL)

Patterned (SAVWE)

Good

Excellent (no cracks)

More than 90%

High

Unpatterned

Fair

Medium (presence of cracks for large devices)

Less that 30%

Medium