Figure 1

Results of laser-inscribing inside silicon substrate as a function of the position of focus in the sample. (a) scheme of inscribing; all the numbers are in micrometre. The italic numbers shows ascending distance d (see text). Blue rectangle indicates the lines inscribed on the top surface. (b) top view, reflected illumination. (c) Top view, transmitted illumination. (d) Backside view, transmitted illumination. (e) Backside view, reflected illumination. Here, ‘backside view’ indicates that the substrate was inverted and observed from above, and the images were flipped so that the geometry agrees with that of the top views.