Figure 2

Pulse energy and scanning speed dependence of modified lines inscribed at \(d=60\)Â \(\upmu \hbox {m}\). Pulse energy was (a) 8.8Â \(\upmu \hbox {J}\), (b) 6.6Â \(\upmu \hbox {J}\), (c) 4.4Â \(\upmu \hbox {J}\), and (d) 2.2Â \(\upmu \hbox {J}\). In each panel, scanning speed was 30, 50, and 70Â \(\upmu \hbox {m}/\hbox {s}\) from top to bottom.