Figure 8

AZO nanomechanical resonator. (a) Vertical nanomechanical capacitive resonator. (b) Vibration mode by FEM simulation. (c) Fabrication process. (c1) Silicon pattering. (c2) AZO capacitive resonator. (d) Fabricated AZO capacitive silicon resonator. (e) Evaluation setup. (f) Frequency response of the AZO capacitive resonator.