Figure 4
From: Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP
Electrochemical interaction evaluation between Cu/Ru films and nicotinic acid inhibitor. Potentiodynamic plots for Cu and Ru in solution as a function of inhibitor concentrations at pH 10 (a–c): (a) w/o nicotinic acid, (b) 0.03 M nicotinic acid, and (c) 0.05 M nicotinic acid. Electrochemical impedance spectroscopy (EIS) data are showing Nyquist plots for (d) Cu film and (e) Ru film in solution for various inhibitor concentrations at pH 10.
