Table 1 The corrosion potentials (Ecorr) and corrosion currents (Icorr) value of each Cu and Ru film according to inhibitor concentration.
From: Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP
Solution system | Cu film | Ru film | ||
|---|---|---|---|---|
Ecorr (V) | Icorr (mA/cm2) | Ecorr (V) | Icorr (mA/cm2) | |
None | −0.27 | 0.22 | 0.22 | 0.05 |
Nicotinic acid 0.03 M | 0.26 | 0.34 | 0.41 | 0.31 |
Nicotinic acid 0.05 M | 0.36 | 0.47 | 0.45 | 0.42 |
