Table 3 The specifications of the microscope.

From: Selection of effective manufacturing conditions for directed energy deposition process using machine learning methods

Parameters

Specification

Magnification

× 4–1,000,000

H.V.

0.2–30 kV (0.1 kV step)

Resolution

SEI: 1.0 nm (30 kV), BEI: 2.0 nm (30 kV)

Internal size

230 mm Dia

Electron gun

High brightness Schottky emitter with EDS & EBSD

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