Figure 13
Microscope top views of the final die. (a) Array of twelve devices; (b) zoom-in of two devices; (c) full array of SOIPAMs around common V-groove.
Figure 13 | Scientific Reports
Microscope top views of the final die. (a) Array of twelve devices; (b) zoom-in of two devices; (c) full array of SOIPAMs around common V-groove.
