Figure 14
SEM top views of the final die. (a) Array of twelve devices and contacts; (b) zoom-in of twelves devices around the V-groove; (c) zoom-in of the V-groove; (d) more zoom-in of the walls of the V-groove.
Figure 14 | Scientific Reports
SEM top views of the final die. (a) Array of twelve devices and contacts; (b) zoom-in of twelves devices around the V-groove; (c) zoom-in of the V-groove; (d) more zoom-in of the walls of the V-groove.
