Table 6 A comparison of thicknesses obtained from ellipsometry and optical transmission measurements.
Power (W) | Power density (W/cm2) | Pressure (mTorr) | Oxygen flow (sccm) | Thickness (nm) [ellipsometry] | Thickness (nm) [transmission] |
|---|---|---|---|---|---|
200 | 0.6 | 3.0 | 2.0 | 73.43 | 73.55 |
300 | 0.9 | 4.0 | 4.0 | 102.07 | 101.23 |
400 | 1.2 | 4.0 | 6.0 | 146.21 | 140.27 |
500 | 1.5 | 4.0 | 6.0 | 256.03 | 268.38 |
600 | 1.9 | 3.0 | 6.0 | 228.42 | 228.89 |
