Figure 5
From: Challenges in nanofabrication for efficient optical metasurfaces
(a) Transmission and dephasing induced by an array of silicon nanocylinders on a normally incident \(\lambda = 750\ \hbox {nm}\) plane wave as a function of a change in height for the ten selected geometries. (b) Diffraction efficiency and wavelength of max. diffraction efficiency as a function of difference in height. (c) Transmission and dephasing induced by an array of silicon nanocylinders on a normally incident \(\lambda = 750\ \hbox {nm}\) plane wave as a function of a change in lateral slope for the ten selected geometries. (d) Diffraction efficiency and wavelength of max. diffraction efficiency as a function of the slope of the cylinder side. The red (resp. blue) dotted lines show the measured values of maximum diffraction efficiency and corresponding wavelength.
