Figure 4
From: Photonic-plasmonic mode coupling in nanopillar Ge-on-Si PIN photodiodes
(a) 3D sketch of the NP-PD device. Metallization and passivation are partly removed. (b) Scanning electron microscopy (SEM) top view image of the device. (c) SEM image of a single NP after etching and before hardmask removal.
