Figure 8
Flowchart of the nanofabrication of GaN NRds with axial InGaN/GaN MQWs by nanoimprint lithography and a mixed dry ICP wet etching process.
Figure 8 | Scientific Reports
Flowchart of the nanofabrication of GaN NRds with axial InGaN/GaN MQWs by nanoimprint lithography and a mixed dry ICP wet etching process.
