Figure 1 | Scientific Reports

Figure 1

From: ZnO nucleation into trititanate nanotubes by ALD equipment techniques, a new way to functionalize layered metal oxides

Figure 1The alternative text for this image may have been generated using AI.

Scheme for the synthesis of zinc oxide by atomic layer deposition (ALD). (1) Diethylzinc (DEZ) pulse injection, (2) chemisorption of DEZ upon the Si wafer surface, (3) purge of unreacted DEZ and by-products, (4) H2O pulse injection, (5) reaction of water with absorbed DEZ, and (6) purge of excess H2O and by-products.

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