Figure 1

Inverse opal fabrication. Fabrication of TiN plasmonic, photonic, and conductive inverse opals. (a) Polystyrene beads in solution were evaporated onto a quartz slide and allowed to dry. These opals were partially infilled with a conformal layer of PEALD SiO₂ and then the organic component was removed by annealing. The remaining SiO₂ inverse opal was then partially infilled with a conformal layer of PEALD TiN. (b) A post-anneal scanning electron micrograph of an inverse opal coated with 47 nm of TiN shows the complex, periodic, and high surface area conductive inverse opal lattice. Starting with a 390 nm polystyrene sphere, a 10 nm SiO₂ conformal coating and a 47 nm TiN conformal coating will yield an outer diameter of 504 nm (in green) and an inner diameter of 276 nm (in purple).