Table 4 Distribution statistics for Si-O, O-Si-O, and Si-Si under ambient and laser modified conditions in CAS10.80.
Parameter | Ambient | 10 eV | 15 eV | 25 eV | 50 eV | 100 eV |
|---|---|---|---|---|---|---|
Si–O–Si | ||||||
Mean | 148.4 ± 0.05 | 147.3 ± 0.06 | 146.8 ± 0.06 | 146.5 ± 0.06 | 146.2 ± 0.06 | 146.0 ± 0.06 |
Median | 148.2 | 147.2 | 146.7 | 146.4 | 146.0 | 145.8 |
SD | 13.9 | 14.5 | 14.8 | 14.9 | 15.0 | 15.0 |
O–Si–O | ||||||
Mean | 109.3 ± 0.01 | 109.2 ± 0.02 | 109.2 ± 0.02 | 109.2 ± .02 | 109.2 ± .02 | 109.2 ± 0.02 |
Median | 108.9 | 108.6 | 108.6 | 108.5 | 108.4 | 108.4 |
SD | 6.70 | 8.30 | 8.54 | 8.82 | 9.01 | 9.05 |
d(Si–O) | ||||||
Mean | 1.61 ± 0.00 | 1.62 ± 0.00 | 1.62 ± 0.00 | 1.62 ± 0.00 | 1.62 ± 0.00 | 1.62 ± 0.00 |
Median | 1.61 | 1.62 | 1.62 | 1.62 | 1.62 | 1.62 |
SD | 0.05 | 0.07 | 0.07 | 0.07 | 0.07 | 0.07 |
d(Si–Si) | ||||||
Mean | 3.098 ± 0.000 | 3.106 ± 0.001 | 3.105 ± 0.001 | 3.105 ± 0.001 | 3.106 ± 0.001 | 3.108 ± 0.001 |
Median | 3.102 | 3.111 | 3.108 | 3.108 | 3.106 | 3.106 |
SD | 0.110 | 0.130 | 0.134 | 0.135 | 0.136 | 0.138 |
