Figure 5

(a) Illustration of the two-layered pellicle model used to fit NR data (illustration created with CorelDRAW, Corel Corporation, Canada). (b) NR curves, in dPBS contrast, and corresponding fits (solid lines) for a clean silicon block and a pellicle adsorbed on that block before and after treatment with dC₁₂E₅. (c) Corresponding SLD profile for both dPBS and hPBS contrasts. On the right hand side, zooms for the regions corresponding to the pellicle outer layer are shown. (d) NR curves, in dPBS contrast, and corresponding fits (solid lines) for a clean silicon block and a pellicle adsorbed on that block before and after treatment with CAPB. (e) Corresponding SLD profiles for both dPBS and hPBS contrasts. On the right hand side zooms for the regions corresponding to the pellicle outer layer are shown.