Table 1 Overview of the used sputtering parameters.
From: Bifunctional catalytic effect of Mo2C/oxide interface on multi-layer graphene growth
Material | Deposition pressure (E-4 mbar) | Ar (sscm) | O2 (sscm) | Current (A) | Voltage (V) | Target name (4 in.), supplier purity (%) |
|---|---|---|---|---|---|---|
Mo | 8.5 | 30 | 0 | 1 | 378 | Mo, Robeko, 99.95 |
SiO2 | 7.8 | 20 | 20 | 0.25 | 306 | Si, Sindhauser, 99.9999 |
TiO2 | 7.2 | 18 | 18 | 1 | 570 | Ti, Robeko, 99.5 |
Al2O3 | 4.2 | 11 | 11 | 1.5 | 386 | Al, Sindhauser, 99.99 |
MgO | 7.9 | 20 | 20 | 1 | 172 | Mg, Sindhauser, 99.95 |
