Figure 3
From: ZrN-ZrOxNy vs ZrO2-ZrOxNy coatings deposited via unbalanced DC magnetron sputtering
High-resolution XPS spectral analysis for the (a) Zr3d, (b) O1s and (c) N1s signals ZrN-ZrOxNy coatings for different sputter etching times.
Figure 3 | Scientific Reports
