Table 1 Summary of XPS binding energy values.
From: ZrN-ZrOxNy vs ZrO2-ZrOxNy coatings deposited via unbalanced DC magnetron sputtering
Sample | Compound | Binding energy | |||
|---|---|---|---|---|---|
Zr3d5/2 | Zr3d3/2 | O1s | N1s | ||
ZrN-ZrOxNy | ZrOxNy | 181.1 | 183.5 | 531.9 | 397.7 |
ZrO2 | 182.0 | 184.4 | 529.8 | ||
ZrNO | 396.0 | ||||
ZrO2-ZrOxNy | ZrO2 | 182.0 | 184.4 | 530.1 | |
ZrN-ZrOxNy-15 min* | ZrN | 179.2 | 181.6 | 395.4 | |
ZrOxNy | 181.0 | 183.4 | 530.7 | 396.5 | |
ZrO2 | 182.7 | 185.1 | 529.5 | ||
ZrO2-ZrOZrOxNy-15 min* | ZrOxNy | 180.0 | 182.4 | 531.4 | 398.3 |
ZrOx | 181.4 | 183.8 | |||
ZrO2 | 183.1 | 185.5 | 530.0 | ||
