Figure 5

XPS binding energy spectra of the ZTO thinfilms with an elemental composition identical to semiconductor channel of 33ZTO and 50ZTO TFTs for the core level of: (a) Sn3d, (b) Zn2p, (c and d) O1s and (e and f) Zn2+2p3/2. Individual component (lattice oxygen and oxygen vacancy) in the broad and asymmetric O1s spectrum and individual component (lattice Zn in the oxide form and Zn interstitials) in the Zn2+2p3/2 spectrum are identified after fitting with multiple Gaussian peaks. Solid green line represents the combined fitting of the sum of all the individual components (blue line).