Figure 1
From: Monolithic processing of a layered flexible robotic actuator film for kinetic electronics
Concept of layered, flexible, film microrobot fabrication. (a) Schematics of layered film soft robot structure. (b) Schematic of monolithic fabrication process of layered film microrobot: (i, ii) Bonding of base films for forming bimorph actuator film; (iii) Cutting the outline of a film robot; (iv–vi) Arrangement of stenciled mask to robot outline and Au deposition by sputtering for electrical layer patterning; and (vii, viii) PDMS mechanical buffer layer coating and wiring. (c) Single-joint single-finger film robot design and photograph (inset).
