Figure 9

Cycle performance of Li-ion batteries with Ge and GeSn (3at% Sn) anodes deposited at a substrate position of 30 mm under a He gas pressure and gas flow rate of 0.1 Torr and 200 sccm, respectively.

Cycle performance of Li-ion batteries with Ge and GeSn (3at% Sn) anodes deposited at a substrate position of 30 mm under a He gas pressure and gas flow rate of 0.1 Torr and 200 sccm, respectively.