Figure 1

Acquisition of ZPC-XANES. (a) Schematic of the off-axis full-field phase contrast XANES spectroscopy setup. The inset shows the 4 μm hole on the Au phase plate. (b) Scanning electron microscope (SEM) images of the Cu reference sample with wedge-shaped structures and bulk Cu. The side view shows the thickness where the beam passes through at the wedge structure with the top with a thickness of 310 nm and the bottom with a thickness of 34 nm. The inset shows the adjusted contrast of wedge Cu. The scale bars are 5 μm.