Table 2 The ranges of variations of those six training variables (v1, v2, v3, v4, v5, and v6), including the upper maximum and lower minimum limits, and MSEs regarding the entire dataset, including before and after unit conversion, are listed for those three data set #1, #2, and #3.
From: Toward fully automated UED operation using two-stage machine learning model
Variable | Formula | Description | Unit | Set 1 (10Â k) | Set 2 (20Â k) | Set 3 (100Â k) | Summary | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Min | Max | MSE | Min | Max | MSE | Min | Max | MSE | Min | Max | MSE/target | ||||
v1 | xoff | x-jitter | μm | 0 | 5 | 0.0731/0.3655 μm | 0 | 5 | 0.0766/0.3830 μm | 0 | 5 | 0.0807/0.4035 μm | 0 | 5 | 0.38 μm/0.50 μm |
v2 | yoff | y-jitter | μm | 0 | 5 | 0.0738/0.3690 μm | 0 | 5 | 0.0707/0.3535 μm | 0 | 5 | 0.0791/0.3955 μm | 0 | 5 | 0.35 μm/0.50 μm |
v3 | σr | spot size | μm | 30 | 220 | 0.1479/28.101 μm | 30 | 200 | 0.1343/22.831 μm | 30 | 200 | 0.1762/29.951 μm | 30 | 200 | 22.8 μm/30 μm |
v4 | ∆VRF/ VRF | RF amplitude jitter |  | − 0.015 | 0.015 | 0.0595/0.002 | − 0.01 | 0.01 | 0.1650/0.003 | − 0.025 | 0.025 | 0.1124/0.006 | − 0.01 | 0.01 | 0.003/0.002 |
v5 | θgun | RF phase | degree | 5 | 30 | 0.1651/4.128° | 5 | 60 | 0.0677/3.724° | 5 | 40 | 0.1682/5.880° | 5 | 60 | 3.7°/3° |
v6 | I/Imax | Solenoid factor | Â | 0 | 0.4 | 0.0307/3.07% | 0 | 0.4 | 0.0269/2.69% | 0 | 0.4 | 0.02912/2.91% | 0 | 0.4 | 2.7%/3% |
