Table 4 The operational and ML optimized electron beam properties at the standard charge of 0.5 pC are shown as the left and right columns, respectively.

From: Toward fully automated UED operation using two-stage machine learning model

 

Conventional e- beam properties

ML optimized e- beam properties

x-divergence (µrad)

140

18

y-divergence (µrad)

140

18

Normalized energy spread (%)

0.025

0.01

Improvement factor

 

151

  1. We only consider the x and y divergences and normalize energy spread of the electron beam, which ultimately limit the UED/UEM instrumental resolution.
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