Figure 2
(a) Raman spectra of BTO bulk target and BTO films deposited under different oxygen partial pressures (Poxygen; 10, 50, 100, and 200 mTorr). (b) Scanning electron microscopy (SEM) images of BTO films for each oxygen partial pressure. (c) Raman spectra of BTO bulk target, as-deposited BTO film, and BTO films annealed at 750, 900, 1000, and 1150 °C. (d) SEM images of BTO films annealed at 750, 900, 1000, and 1150 °C. SEM image of BTO film annealed at 1000 °C has a higher magnification to clearly display nanoscale particles with the size of a few to several nanometers.
