Figure 4 | Scientific Reports

Figure 4

From: Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment

Figure 4

(a) Three-dimensional atomic force microscopy (AFM) images of BTO films annealed at 1000 °C before and after CMP. Z-axis scale of the film before CMP is larger than that of the film after CMP because of surface textures. (b) Cross-sectional scanning electron microscopy (SEM) images of BTO films annealed at 900, 1000, and 1150 °C after CMP, and the top view of the SEM image of the BTO film annealed at 1150 °C after CMP. (c) XRD patterns of BTO films annealed at 900, 1000, and 1150 °C after CMP.

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