Figure 5
(a) Schematic image of Au/Ti coplanar electrodes on BTO film. Electrode with θ = 0° was aligned to MgO [100] direction and each channel between electrodes was aligned at 0, 15, 30, and 45° to MgO [100] direction. (b) Capacitance–voltage (C–V) curves of BTO film at different post-annealing temperatures (Tannealing; 900, 1000, and 1150 °C) measured with a coplanar electrode parallel to the MgO [100] direction. The direction of voltage sweep (indicated by arrows) is from −20 to 20 V and then from 20 to −20 V. (c) Capacitance–voltage curves of BTO film annealed at 1150 °C with electrode angles (θ) of 0, 15, 30 and 45°.
