Figure 3 | Scientific Reports

Figure 3

From: Enhanced photonics devices based on low temperature plasma-deposited dichlorosilane-based ultra-silicon-rich nitride (Si8N)

Figure 3

(a) Dispersion spectra of DCS-based USRN films characterized using a variable-angle spectroscopic ellipsometry over wavelength range from 400 to 1600 nm. Film refractive index, n is shown by the blue line (corresponds to the left vertical axis) and extinction coefficient, k is shown by the purple line (corresponds to the right vertical axis). (b) Magnified wavelength range from 1500 to 1600 nm (in steps of 10 nm) showing refractive index, n of DCS-based USRN film ~ 3.12 at 1550 nm wavelength. (c) Extinction coefficient, k of DCS-based USRN film from ~ 660 to 1600 nm wavelength range. The graph shows k reducing to 0 in the 700 nm wavelength region. Inset shows zoom-in around 700 nm wavelength region and reveal k ~ 0 (negligible) at λ ~ 700 nm. (d) Extinction coefficient, k of 4 DCS-based USRN film samples with k plotted in logarithm scale. The lowest k in this case is ~ 10–5 which occurs at ~ 730 nm wavelength.

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