Figure 6

Resolution estimates of the images recorded of the microchip: (a) Fourier ring correlation of the reconstruction of two identical and consecutive scans, estimating a resolution of 95 nm. (b) edge feature on the phase image chosen for a line profile (orange line). The scale bar (red) has a length of 2 μm. (c) the extracted profile across the edge feature (orange) and the fit of an error function (blue) giving a resolution estimate of 114 nm.