Figure 4
From: Experimental research on surface acoustic wave microfluidic atomization for drug delivery
Schematic diagram of the fabrication scheme based on the SU-8 microchannel (a) SAW device. (b) Photolithography of SU-8 microchannels on the substrate surface. (c) Coating silicon dioxide film on the upper surface of the microchannel. (d) Bonding the PDMS layer with the microchannel to form a closed microchannel.
