Table 4 The models of test equipment for protein electrophoresis microfluidic chip.
Evaluation criteria | Residual stress | Warpage | Replication fidelity |
|---|---|---|---|
Equipment | Double refraction instrument | Three coordinate measuring system | Laser scanning confocal microscope |
Models | WPA-200 | GLOBAL STATUS575 | Axio LSM700 |
Company | Photonic Lattic | Brown & Sharpe Inc | Zeiss |
Production areas | Japan | America | Germany |