Figure 2 | Scientific Reports

Figure 2

From: Microvalve array fabrication using selective PDMS (polydimethylsiloxane) bonding through Perfluorooctyl-trichlorosilane passivation for long-term space exploration

Figure 2

The measured deposition rate of PFTCS depending on vacuum level. All experiments measurements were done after 30 min of deposition and in triplicate. The sharp increase at 73 kPa is due to the vapor pressure of PFTCS and deposition at lower vacuum levels is primarily due to the volatility of the PFTCS.

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