Figure 4

The Id–Vg curves of 4000 samples of the single-layer ADG 1 T-DRAMs and the 3-D stacked ADG 1 T-DRAMs. The parameters adopted are Lmg = 70 nm, Lcg = 50 nm, Tox = 3 nm, Tbody = 12 nm, and Tspacer = 30 nm.

The Id–Vg curves of 4000 samples of the single-layer ADG 1 T-DRAMs and the 3-D stacked ADG 1 T-DRAMs. The parameters adopted are Lmg = 70 nm, Lcg = 50 nm, Tox = 3 nm, Tbody = 12 nm, and Tspacer = 30 nm.