Figure 5
From: Highly efficient dual-level grating couplers for silicon nitride photonics
(a) Numerically simulated CE as a function of wavelength for dual-level Si–Si\(_3\)N\(_4\) GCs considering 400 nm and 150 nm thick Si\(_3\)N\(_4\) platforms; (b) peak CE at 1550 nm and 1 dB BW as a function of the coupling angle \(\theta\) for dual-level Si–Si\(_3\)N\(_4\) GC for a 400 nm thick Si\(_3\)N\(_4\) platform.
