Figure 6
From: Highly efficient dual-level grating couplers for silicon nitride photonics

2D schematic view of the proposed dual-level Si\(_x\)N\(_y\)–Si\(_3\)N\(_4\) GC.
From: Highly efficient dual-level grating couplers for silicon nitride photonics

2D schematic view of the proposed dual-level Si\(_x\)N\(_y\)–Si\(_3\)N\(_4\) GC.