Table 3 Design parameters of the simulated Si\(_x\)N\(_y\)–Si\(_3\)N\(_4\) GCs for a 400 nm thick Si\(_3\)N\(_4\) photonic platform with Si\(_x\)N\(_y\) and Si\(_3\)N\(_4\) as top layer materials.
From: Highly efficient dual-level grating couplers for silicon nitride photonics
Initial parameters | Particle swarm optimization results | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
\(h_{1}\) (nm) | \(n_2\) | B (\(\upmu\)m) | e (nm) | \(h_2\) (nm) | \(R_1\) (\(\upmu\)m\(^{-1}\)) | \(R_2\) (\(\upmu\)m\(^{-1}\)) | \(\Lambda\) (nm) | s (nm) | T [\(\upmu\)m] | \(\theta\) | \(z_f\) (\(\upmu\)m) |
400 | 3.3 | 3 | 245 | 74 | 0.0395 | 0.0405 | 942 | 67 | 0.48 | 1.8 | 7.2 |
400 | 3.1 | 3 | 245 | 88 | 0.0395 | 0.0415 | 941 | 57 | 0.48 | 1.8 | 7.2 |
400 | 2.9 | 3 | 245 | 109 | 0.0390 | 0.0410 | 941 | 48 | 0.47 | 1.7 | 7.3 |
400 | 2.7 | 3 | 240 | 139 | 0.0440 | 0.0400 | 941 | 32 | 0.47 | 1.7 | 7.1 |
400 | 2.5 | 3 | 240 | 165 | 0.0410 | 0.0420 | 940 | 20 | 0.47 | 1.7 | 7.1 |
400 | 2.3 | 3 | 230 | 188 | 0.0345 | 0.0375 | 937 | 20 | 0.45 | 1.3 | 8 |
400 | 2.1 | 3 | 230 | 242 | 0.0295 | 0.0380 | 938 | 20 | 0.37 | 1.3 | 8.3 |
400 | 2 | 3 | 230 | 287 | 0.0295 | 0.0375 | 939 | 20 | 0.31 | 1.3 | 8.3 |
