Figure 3
From: 110 GHz, 110 mW hybrid silicon-lithium niobate Mach-Zehnder modulator
(a) Fabrication process flow of the hybrid bonded Si/LN MZM. (b) Optical microscope image of hybrid bonded Si/LN chip with gold SWE. (b) The fabricated hybrid bonded Si/LN MZM chip. (c) A stitched optical microscope image of a 5 mm long SWE. (d) A scanning electron microscope image of the inductively loaded slot features.
