Figure 3
SIMS depth profiles of hydrogen, hydroxide (OH), and indium (In) in as-grown and annealed a-IGZO films; (a) conventional a-IGZO film, (b) a-IGZO film covered with SiNx, (c) a-IGZO film covered with SiOx, and (d) XPS spectra of the In3d intensity in the dashed open circle area shown in (c) for as-grown and annealed a-IGZO films covered with SiOx.
